Suppressed drift and low-noise sensor module with a single-axis gold proof-mass MEMS accelerometer for micro muscle sound measurement
نویسندگان
چکیده
Abstract This paper describes a highly sensitive microelectromechanical systems (MEMS) accelerometer sensor module to measure micro muscle sounds. Regarding the drift mechanism, we focus on charged particles based residual water related MEMS fabrication. Based temperature programmed desorption analysis and electrical experiments, it is clarified that caused by negatively OH − suppressed vacuum packaging. The noise floor can be reduced improved sensitivity of accelerometer. developed realize 1157.0 fF/G Brownian 149.0 nG/√Hz. consisting capacitance digital converter achieve 26.7 μ G/√Hz without any obvious drifts, establishing target value less than 50 G/√Hz. Therefore, confirmed detect sounds contracting in frequency range 20–40 Hz.
منابع مشابه
Noise and reliability measurement of a three-axis micro-accelerometer
A special measurement system is developed to measure the combined noise and reliability of a three-axis micro-accelerometer. Three parametric tests are provided: gravitational, thermal and acoustical. The measurements were performed on both the in-plane and the out-of-plane axes. The temperature-dependence and acceleration-dependence of the noise was found, in agreement and contrast to the theo...
متن کاملController Design of a MEMS Gyro-Accelerometer with a Single Proof Mass
This paper presents a parametric study on the controller design scheme for a gyroaccelerometer to have robust performance under some parameter variations. In particular, an integral and derivative based controller design method is suggested to achieve the desired performances of stability margin, bandwidth, and uniformity of scale for both gyroscopes and accelerometers with uncertainties of qua...
متن کاملA Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge was constructed through easy wiring allowed by the three metal layers in the 0.5 μm CMOS technology...
متن کاملEvaluation of a Low-cost MEMS Accelerometer for Distance Measurement
This paper gives an evaluation of a low-cost MEMS accelerometer. The accelerometer is intended for the distance measurement of a mobile robot or platform in short duration. The distance traveled is obtained by double integration of the sensor signal with time. Bias offset drift exhibited in the acceleration signal is accumulative and the accuracy of the distance measurement can deteriorate with...
متن کاملMEMS digital output motion sensor ultra low-power high performance three-axis “nano” accelerometer
■ Wide supply voltage, 1.71 V to 3.6 V ■ Independent IOs supply (1.8 V) and supply voltage compatible ■ Ultra low-power consumption ■ ±2g/±4g/±6g/±8g/±16g dynamically selectable full-scale ■ I2C/SPI digital output interface ■ 16-bit data output ■ Programmable embedded state machines ■ Embedded temperature sensor ■ Embedded self-test ■ Embedded FIFO ■ 10000 g high shock survivability ■ ECOPACK® ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Japanese Journal of Applied Physics
سال: 2022
ISSN: ['0021-4922', '1347-4065']
DOI: https://doi.org/10.35848/1347-4065/ac5b25